Applications of negative-ion beams

This publication has 12 references indexed in Scilit:

• Radio frequency plasma sputter type heavy negative ion source
  Vacuum, 1993
• Carbon negative ion implantation into silicon
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
• Negative ion beam technology for materials science (invited)
  Review of Scientific Instruments, 1992
• High-intensity plasma-sputter heavy negative-ion source (invited)
  Review of Scientific Instruments, 1990
• Electron detachment cross-sections for heavy negative-ion beam
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
• A heavy negative ion sputter source: Production mechanism of negative ions and their applications
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
• Surface structure estimation by plasma fluorination of amorphous carbon, diamond, graphite and plastic film surfaces
  Journal of Physics D: Applied Physics, 1986
• Mass-separated negative-ion-beam deposition system
  Review of Scientific Instruments, 1986
• Neutral and ionized alkaline metal bombardment type heavy negative-ion source (NIABNIS)
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
• A close to universal negative ion source
  Nuclear Instruments and Methods, 1974