Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets
- 1 May 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (5R)
- https://doi.org/10.1143/jjap.31.1473
Abstract
A multi-ring-cusp-type surface magnetic field is tested for production of large-diameter electron cyclotron resonance (ECR) plasma. The density and its distribution are improved by means of a new launching system consisting of an adjustable antenna and a microwave suppressor inserted into the vacuum chamber, which forces the microwave to propagate into the plasma from the stronger side of the surface magnetic fields.Keywords
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