Effect of Microstructure on the Electromigration Life of Thin-Film A1–Cu Conductors

Abstract
The role of microstructural variables on the electromigration life of A1–Cu conductors is investigated. Experiments show that the lifetime of A1–Cu films is very sensitive to grainsize distribution and is independent of the amount of precipitate phase in the film. These results are explained in terms of a vacancy flux divergence model.