Electro-optic probing of RF signals in submicrometreMMIC devices
- 7 December 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (25) , 2188-2189
- https://doi.org/10.1049/el:19951465
Abstract
A high resolution electro-optic measurement system for probing RF electric field distributions in submicrometre MMIC devices is presented. As an example, field distributions in an interdigital structure are displayed, revealing a spatial resolution of much less than 0.5 µm. This feature makes electro-optic probing a unique technique for circuit- and also device-internal measurements of electrical signals combining high bandwidth and noninvasiveness with submicrometre resolution.Keywords
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