Light-soaking in a-SiC:H films grown by PECVD in undiluted and hydrogen diluted SiH4 + CH4 gas mixtures
- 1 May 1996
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 198-200, 490-494
- https://doi.org/10.1016/0022-3093(95)00754-7
Abstract
No abstract availableKeywords
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