Non-conventional techniques for optical lithography
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4) , 205-211
- https://doi.org/10.1016/0167-9317(94)00090-h
Abstract
No abstract availableKeywords
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- HOLOGRAPHY WITH TOTAL INTERNALLY REFLECTED LIGHTApplied Physics Letters, 1967
- Theory of Fresnel Images I Plane Periodic Objects in Monochromatic Light*Journal of the Optical Society of America, 1965