Synthesis of Metal Chalcogenide Nanodot Arrays Using Block Copolymer-Derived Nanoreactors
- 28 September 2007
- journal article
- Published by American Chemical Society (ACS) in Nano Letters
- Vol. 7 (11) , 3504-3507
- https://doi.org/10.1021/nl072109b
Abstract
Soluble metal chalcogenide precursors are used to fabricate arrays of metal chalcogenide nanodots by spin-coating. Nanodots are formed after thermal decomposition of the precursors, which are collected in patterned nanowell arrays. These arrays are derived from block copolymer patterns and may consist of the polymer itself or result from etching to transfer the pattern to an inorganic substrate. Etching provides enhanced control over nanowell shape and the morphology of the resulting metal chalcogenide array.Keywords
This publication has 18 references indexed in Scilit:
- Solution-phase deposition and nanopatterning of GeSbSe phase-change materialsNature Materials, 2007
- Nanolithography with coherent extreme ultraviolet lightJournal of Physics D: Applied Physics, 2006
- Mass-Limited Growth in Zeptoliter Beakers: A General Approach for the Synthesis of NanocrystalsNano Letters, 2004
- Fabrication of hcp-Co Nanocrystals via Rapid Pyrolysis in Inverse PS-b-PVP Micelles and Thermal AnnealingNano Letters, 2003
- Process integration of self-assembled polymer templates into silicon nanofabricationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Nanoscale patterning using self-assembled polymers for semiconductor applicationsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001
- Integration of self-assembled diblock copolymers for semiconductor capacitor fabricationApplied Physics Letters, 2001
- Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square CentimeterScience, 1997
- Preparation of Noble-Metal Colloids in Block Copolymer Micelles and Their Catalytic Properties in HydrogenationChemistry of Materials, 1997
- Small-angle x-ray scattering from ternary microemulsions determines microstructureThe Journal of Physical Chemistry, 1988