Annealing of Antimony Implanted Silicon with Halogen Lamp Irradiation
- 16 August 1982
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 72 (2) , K173-K176
- https://doi.org/10.1002/pssa.2210720262
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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- Solid Solubilities of Impurity Elements in Germanium and Silicon*Bell System Technical Journal, 1960