Transmission electron microscope study of ion beam induced interfacial reactions in molybdenum thin films on silicon
- 31 July 1982
- journal article
- Published by Elsevier in Applications of Surface Science
- Vol. 11-12, 202-208
- https://doi.org/10.1016/0378-5963(82)90067-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Characterization of Thin Film Molybdenum Silicide OxideJournal of the Electrochemical Society, 1980
- Silicidbildung in dünnen molybdän- und wolframschichten auf einkristallinen siliziumsubstraten bei relativ niedrigen temperaturenThin Solid Films, 1976
- Migration of Mo atoms across Mo–Si interface induced by Ar+ ion bombardmentApplied Physics Letters, 1974
- Growth Kinetics Observed in the Formation of Metal Silicides on SiliconApplied Physics Letters, 1972