Double Pass Metallization For Cmos Aluminum Actuators
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 360-363
- https://doi.org/10.1109/sensor.1995.721821
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- DIMES-01, a baseline BIFET process for smart sensor experimentationSensors and Actuators A: Physical, 1993
- Surface micromachined scanning mirrorsMicroelectronic Engineering, 1992
- Deformable-Mirror Spatial Light ModulatorsPublished by SPIE-Intl Soc Optical Eng ,1990