In situ x-ray diffraction studies of YBa2Cu3Ox
- 15 November 1992
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (10) , 4798-4804
- https://doi.org/10.1063/1.352093
Abstract
Using a specially designed off‐axis faced magnetron sputtering chamber we have performed in situ x‐ray diffraction studies of the growth of YBa2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.This publication has 8 references indexed in Scilit:
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