In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth
- 20 May 1991
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (20) , 2303-2305
- https://doi.org/10.1063/1.104906
Abstract
We report the first real time, in situ synchrotron x‐ray studies of Y‐Ba‐Cu‐O thin‐film growth on (100) SrTiO3 using a miniature, faced‐magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.Keywords
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