Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching
- 31 March 2005
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 78-79, 314-318
- https://doi.org/10.1016/j.mee.2004.12.040
Abstract
No abstract availableKeywords
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