Elastic Properties of Silicate Glass and Spin-On Glass Thin Films
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Characterization of silicon dioxide and phosphosilicate glass deposited filmsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Structural relaxation in polymeric films studied by Brillouin light spectroscopyPhysical Review B, 1993
- Stress in SiO2 Films Deposited by Plasma and Ozone Tetraethylorthosilicate Chemical Vapor Deposition ProcessesJournal of the Electrochemical Society, 1992
- Stress in silicon dioxide films deposited using chemical vapor deposition techniques and the effect of annealing on these stressesJournal of Vacuum Science & Technology B, 1990
- Determination of the whole set of elastic constants of a polymeric Langmuir-Blodgett film by Brillouin spectroscopyPhysical Review B, 1989
- Evidence for the existence of guided longitudinal acoustic phonons in ZnSe films on GaAsPhysical Review Letters, 1988
- Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal historyIEEE Transactions on Electron Devices, 1987
- Modified Phosphosilicate Glasses for VLSI ApplicationsJournal of the Electrochemical Society, 1985
- Temperature dependence of stresses in chemical vapor deposited vitreous filmsJournal of Applied Physics, 1980
- Calculated elastic constants for stress problems associated with semiconductor devicesJournal of Applied Physics, 1973