Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM
- 1 April 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 97-98, 239-245
- https://doi.org/10.1016/s0924-4247(01)00861-5
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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