Source materials for ion implantation
- 1 December 1973
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 23 (11) , 645-648
- https://doi.org/10.1063/1.1654778
Abstract
A survey is given of source materials which can be used to draw ion currents from a Nielsen source. More than 50 different ion species are listed including Pd+, Ir+, Pt+, and Au+. Actual currents obtained during implantation are also reported.Keywords
This publication has 4 references indexed in Scilit:
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- Determination of deep energy levels in Si by MOS techniquesApplied Physics Letters, 1972
- Control of Positive Surface Charge in Si–SiO2 Interfaces by Use of Implanted Cs IonsApplied Physics Letters, 1971
- The development of magnetic ion sources for an electromagnetic isotope separatorNuclear Instruments, 1957