Kinetics of hillock growth in Al and Al-alloys
- 31 January 2000
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 50 (1-4) , 301-309
- https://doi.org/10.1016/s0167-9317(99)00296-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Hillock recognition by digital image processingApplied Surface Science, 1995
- Hillock growth on aluminum and aluminum alloy filmsThin Solid Films, 1992
- Metallurgical topics in silicon device interconnections: Thin film stressesInternational Materials Reviews, 1989
- A study of heating rate and texture influences on annealing hillocks by a statistical characterization of Al thin-film topographyJournal of Applied Physics, 1988