Pulsed laser synthesis of titanium silicides using a Q-Switched Nd: Glass laser
- 1 June 1989
- journal article
- solids and-materials
- Published by Springer Nature in Applied Physics A
- Vol. 48 (6) , 503-507
- https://doi.org/10.1007/bf00617850
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiationApplied Physics Letters, 1988
- Processing of titanium films on silicon using a Q-switched ruby laserThin Solid Films, 1986
- Metal silicides with energetic pulsesApplied Physics A, 1986
- Chromium silicide formation under pulsed heat flowThin Solid Films, 1986
- Kinetics of formation of silicides: A reviewJournal of Materials Research, 1986
- Resistivities of Thin Film Transition Metal SilicidesJournal of the Electrochemical Society, 1982