Crystallization of Molybdenum Disulfide Films Deposited by Pulsed Laser Ablation

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Abstract
Pulsed laser ablation (PLA) is an emerging technology that provides a mechanism to deposit lubricious films and to tailor film properties by the appropriate choice of substrate materials, deposition parameters and post deposition treatments. The properties of MoS2 films deposited by PLA are evaluated as a function of: (1) substrate material, (2) duration of post deposition annealing treatments using 248 nm laser radiation and (3) substrate temperature during deposition. The chemistry and crystal structure of the different films are determined using small angle X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS). The tribological properties of the films are then evaluated as a function of their chemistry and crystal structure.