Measurement of thermal diffusivities of thin metallic films using the ac calorimetric method
- 1 August 1997
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 82 (3) , 1153-1156
- https://doi.org/10.1063/1.365882
Abstract
The thermal diffusivities of thin films of evaporated metal less than 1×10−6 m thick have been measured using the light-irradiation ac calorimetric method. The thermal diffusivities of metallic thin films become smaller than those of the bulk as the thickness of the metallic thin films decreases. It is determined, using x-ray diffraction measurement, that the decrease of thermal diffusivity of thin films of evaporated metal is caused by a decrease in crystalline size.This publication has 10 references indexed in Scilit:
- Analysis of ac temperature wave during the measurement of thermal diffusivity of two-layered platelike samplesJournal of Applied Physics, 1996
- Photoacoustic characterization of thermal transport properties in thin films and microstructuresThin Solid Films, 1994
- Ingenious Method for Eliminating Effects of Heat Loss in Measurements of Thermal Diffusivity by ac Calorimetric MethodJapanese Journal of Applied Physics, 1993
- Thermal conductivity of thin films: Measurements and understandingJournal of Vacuum Science & Technology A, 1989
- Transient thermoreflectance from thin metal filmsJournal of Applied Physics, 1986
- Thermal diffusivity measurement of thin films by means of an ac calorimetric methodReview of Scientific Instruments, 1985
- Pulse method for the measurement of the thermal conductivity of thin filmsThin Solid Films, 1976
- Thermal conductivity of copper filmsThin Solid Films, 1974
- Experimental determination of the thermal conductivity of thin filmsThin Solid Films, 1973
- Method for the determination of the thermophysical properties of evaporated thin filmsThin Solid Films, 1973