Effects of Heat Treatment on Electron‐Gun‐Deposited SiO2 Films
- 1 April 1969
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 52 (4) , 225-226
- https://doi.org/10.1111/j.1151-2916.1969.tb13380.x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Measurement of Epitaxial Film Thickness Using an Infrared EllipsometerJournal of the Electrochemical Society, 1966
- Structural Evaluation of Silicon Oxide FilmsJournal of the Electrochemical Society, 1965
- The deposition of alumina, silica and magnesia films by electron bombardment evaporationMicroelectronics Reliability, 1964