Hydrogen profiling by proton-proton scattering
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1-6) , 492-494
- https://doi.org/10.1016/0168-583x(86)90349-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Hydrogen depth profiling using SIMS—Problems and their solutionsJournal of Vacuum Science and Technology, 1981
- Quantitative determination of hydrogen in silicon-nitride films using proton-proton scatteringApplied Physics Letters, 1980
- Technique for profiling 1H with 2.5-MeV Van de Graaff acceleratorsApplied Physics Letters, 1979
- Nondestructive Analysis for Trace Amounts of HydrogenJournal of Applied Physics, 1972