Automatic removal of substrate backscattering effects in Auger imaging and spectroscopy

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Abstract
The York multi‐spectral scanning Auger microscope has been used to investigate the correlations between Auger and backscattered electron images collected simultaneously from a electron spectrometer and the quadrants of a Sip‐n junction backscattered electron detector. Digital signal processing of the four backscattered electron signals allows the calculation of the Auger backscattering factor at each pixel position, the division of which into the Auger image allows the removal of contrast due to subsurface composition variations. The method, which allows the quantification of complicated heterogeneous samples, requires no fitting parameters or prior knowledge regarding the sample.