Effect of buoyancy forces and reactor orientation on fluid flow and growth rate uniformity in cold-wall channel CVD reactors
- 1 January 1989
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 94 (1) , 145-158
- https://doi.org/10.1016/0022-0248(89)90613-1
Abstract
No abstract availableKeywords
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