CVD réactive de SiC sur graphite; Comparaison entre résultats expérimentaux et prévisions thermodynamiques
- 1 October 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 92 (3-4) , 553-570
- https://doi.org/10.1016/0022-0248(88)90041-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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