Anisotropic etching of silicon crystals in KOH solution

This publication has 35 references indexed in Scilit:

• Micro-machining: A survey of the most commonly used processes
  Sensors and Actuators, 1989
• Analysis and design of a four-terminal silicon pressure sensor at the centre of a diaphragm
  Sensors and Actuators, 1987
• Topography of etched rhombohedral faces of quartz crystals: evidence for orientation effects
  Journal of Materials Science, 1986
• Surface texture of chemically etched AT-cut quartz plates
  Surface Technology, 1984
• Chemical etching of deformation sub-structures in quartz
  Physics and Chemistry of Minerals, 1983
• Silicon as a mechanical material
  Proceedings of the IEEE, 1982
• Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors
  IEEE Transactions on Electron Devices, 1979
• Dynamic micromechanics on silicon: Techniques and devices
  IEEE Transactions on Electron Devices, 1978
• The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate
  IBM Journal of Research and Development, 1968
• Etching Behavior of the {110} and {100} Surfaces of InSb
  Journal of the Electrochemical Society, 1960