A 1024-element bulk-micromachined thermopile infrared imaging array
- 1 March 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 73 (3) , 222-231
- https://doi.org/10.1016/s0924-4247(98)00276-3
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Micromachined electron tunneling infrared sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Industrial fabrication technology for CMOS infrared sensor arraysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Uncooled infrared focal plane array having 128 x 128 thermopile detector elementsPublished by SPIE-Intl Soc Optical Eng ,1994
- An integrated mass flow sensor with on-chip CMOS interface circuitryIEEE Transactions on Electron Devices, 1992
- A multiplexed silicon infrared thermal imagerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- Wide‐Band Radiation ThermometersPublished by Wiley ,1988
- Infrared Detector Based On An Integrated Silicon ThermopilePublished by SPIE-Intl Soc Optical Eng ,1987
- A silicon-thermopile-based infrared sensing array for use in automated manufacturingIEEE Transactions on Electron Devices, 1986
- 160 × 244 Element PtSi Schottky-barrier IR-CCD image sensorIEEE Transactions on Electron Devices, 1985
- A monolithic thermopile detector fabricated using integrated-circuit technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1980