Deposition and characterization of amorphous carbon nitride thin films
- 15 April 1995
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (4) , 361-365
- https://doi.org/10.1016/0925-9635(94)05282-4
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Carbon Nitride Deposited Using Energetic Species: A Two-Phase SystemPhysical Review Letters, 1994
- Incorporation of nitrogen into diamond-like carbon filmsDiamond and Related Materials, 1994
- Observation of crystallinePhysical Review B, 1994
- Possibility of carbon nitride formation by low-energy nitrogen implantation into graphite: In situ electron spectroscopy studiesApplied Physics Letters, 1994
- Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma depositionDiamond and Related Materials, 1994
- Optical and electronic properties of nitrogen-implanted diamond-like carbon filmsJournal of Materials Research, 1994
- Experimental Realization of the Covalent Solid Carbon NitrideScience, 1993
- Formation of Carbon Nitride Films by Means of Ion Assisted Dynamic Mixing (IVD) MethodJapanese Journal of Applied Physics, 1993
- π-bonded clusters in amorphous carbon materialsPhilosophical Magazine Part B, 1992
- Structure and bonding studies of the C:N thin films produced by rf sputtering methodJournal of Materials Research, 1990