Atomic Profiles of High Energy (MeV) Si Implanted into GaAs

This publication has 4 references indexed in Scilit:

• MeV Implantation Of N-Type Dopants Into GaAs
  Published by SPIE-Intl Soc Optical Eng ,1985
• MeV Si implantation in GaAs
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Ion Implantation Range and Energy Deposition Distributions
  Published by Springer Nature ,1975
• Range and stopping-power tables for heavy ions
  Atomic Data and Nuclear Data Tables, 1970