The effect of Pd coating on electron emission from silicon field emitter arrays
Open Access
- 15 May 2000
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 87 (10) , 7349-7353
- https://doi.org/10.1063/1.372992
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
- Improvement of electron emission efficiency and stability by surface application of molybdenum silicide onto gated poly-Si field emittersIEEE Electron Device Letters, 1998
- Emission characteristics of TiN-coated silicon field emitter arraysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Emission Characteristics of the Molybdenum-Coated Silicon Field Emitter ArrayJapanese Journal of Applied Physics, 1996
- Surface-science aspects of vacuum microelectronicsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Effects of potassium and lithium metal deposition on the emission characteristics of Spindt-type thin-film field emission microcathode arraysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Influence of cathode material on emission characteristics of field emitters for microelectronics devicesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- A survey of the present status of vacuum microelectronicsSolid-State Electronics, 1993
- Surface composition of Si-TaSi2 eutectic cathodes and its effect on vacuum field emissionApplied Physics Letters, 1992
- Field-emitter arrays for vacuum microelectronicsIEEE Transactions on Electron Devices, 1991
- Field emission from metal-coated silicon tipsIEEE Transactions on Electron Devices, 1991