Dependence of microstructure of TiN coatings on their thickness
- 1 April 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 158 (2) , 225-232
- https://doi.org/10.1016/0040-6090(88)90024-7
Abstract
No abstract availableKeywords
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- X-ray line broadening from filed aluminium and wolframActa Metallurgica, 1953