Calibration improvement of Fourier transform infrared phase-modulated ellipsometry

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Abstract
An improved self-consistent calibration procedure has been developed for FTIR phase-modulated ellipsometers. The new calibration method basically considers the effect of multiple reflections between the modulator faces in the intensity detected. The alignment, orientation, and calibration procedures are described in detail. The use of extra polarizers or analyzers is also discussed. The new calibration method removes the Bessel function background with an accuracy better than 0.5% in the wave-number range from 1000 to 4000 cm−1. The examples provided illustrate the accuracy in the measurement of Ψ and Δ angles, which turns out to be less than 1° on average.