Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films
- 1 October 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 77 (2) , 106-112
- https://doi.org/10.1016/s0924-4247(99)00070-9
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Piezoelectric and dielectric properties of sputter deposited (111), (100) and random-textured Pb(ZrxTi1-x)O3(PZT) thin filmsFerroelectrics, 1999
- Which PZT thin films for piezoelectric microactuator applications?Integrated Ferroelectrics, 1998
- Ultrasonic flexural Lamb-wave actuators based on PZT thin filmSensors and Actuators A: Physical, 1998
- Piezoelectric thin films for memsIntegrated Ferroelectrics, 1997
- Piezoelectric properties of c-axis oriented Pb(Zr,Ti)O3 thin filmsApplied Physics Letters, 1997
- Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditionsSensors and Actuators A: Physical, 1996
- A Technique for the Measurement of d31 Coefficient of Piezoelectric Thin FilmsMRS Proceedings, 1996
- Force sensing microcantilever using sputtered zinc oxide thin filmApplied Physics Letters, 1994
- Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applicationsSensors and Actuators A: Physical, 1992
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992