Effect of laser beam irradiation on the electrophysical properties of the interface in boron ion implanted MIS structures
- 16 September 1978
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 49 (1) , 405-411
- https://doi.org/10.1002/pssa.2210490151
Abstract
No abstract availableKeywords
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