Electrical properties of He-implantation-produced nanocavities in silicon
- 15 July 1994
- journal article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 50 (4) , 2458-2473
- https://doi.org/10.1103/physrevb.50.2458
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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