Abstract
The scattering of re-emitted electrons in various thin layers is directly simulated by a Monte Carlo method. The major processes taken into account in the present work are elastic scattering by atomic nuclei and inelastic scattering by atomic electrons. The effect of the cross-sections for the scatterings on the energy and angular distributions of both transmitted and back-scattered electrons is studied. The dependence of the distributions on the atomic number of the layers and their thicknesses is also investigated.