Body contacts in InP-based InAlAs/InGaAs HEMTs andtheir effects on breakdown voltage and kink suppression

Abstract
The authors investigate the effects of body contacts in InP-based In0.52Al0.48As/In0.53Ga0.47As HEMTs. A body contact connecting a floating InAlAs buffer to an ohmic electrode is formed by a buried p-layer and the Zn-diffused p+-region in the electrode. The body contact successfully prevents holes generated by impact ionisation from accumulating in the channel, resulting in higher breakdown voltage and kink-free I/V characteristics.