A novel body contact for SIMOX based SOI MOSFETs
- 1 October 1991
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 34 (10) , 1071-1075
- https://doi.org/10.1016/0038-1101(91)90102-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Single-transistor latch in SOI MOSFETsIEEE Electron Device Letters, 1988
- Simplified analysis of body-contact effect for MOSFET/SOIIEEE Transactions on Electron Devices, 1988
- Selectively implanted buried oxide (SIBO) process for VLSI applicationsElectronics Letters, 1987
- Dielectrically isolated silicon-on-insulator islands by masked oxygen implantationApplied Physics Letters, 1987
- Patterned implanted buried-oxide transistor structuresJournal of Applied Physics, 1986
- Optimization of oxygen-implanted silicon substrates for CMOS devices by electrical characterizationIEEE Transactions on Electron Devices, 1986