Ion beam suppression of hillock growth in aluminium thin films
- 1 January 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 156 (1) , 173-180
- https://doi.org/10.1016/0040-6090(88)90292-1
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Elimination of hillocks on Al-Si metallization by fast-heat-pulse alloyingApplied Physics Letters, 1984
- Processes for multilevel metallizationJournal of Vacuum Science and Technology, 1974
- Hillock Growth on Vacuum Deposited Aluminum FilmsJournal of Vacuum Science and Technology, 1972