Optical diagnostics of d.c. and r.f. argon magnetron discharges
- 1 September 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 479-484
- https://doi.org/10.1016/0257-8972(95)08250-6
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Study of an argon magnetron discharge used for molybdenum sputtering. II. Spectroscopic analysis and comparison with the modelPlasma Sources Science and Technology, 1993
- Optical emission diagnostics of an rf magnetron sputtering dischargeSpectrochimica Acta Part B: Atomic Spectroscopy, 1993
- Populations in the metastable and the resonance levels of argon and stepwise ionization effects in a low-pressure argon positive columnJournal of Applied Physics, 1985
- Modelling of the low-pressure argon positive columnJournal of Applied Physics, 1983
- Distribution Radiale de la Densité des Atomes Métastables dans les Plasmas Produits par un Champ Electrique Continu ou de Haute‐FréquenceContributions to Plasma Physics, 1983