High-accuracy length metrology using multiple-stage swept-frequency interferometry with laser diodes
- 1 July 1998
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 9 (7) , 1036-1041
- https://doi.org/10.1088/0957-0233/9/7/005
Abstract
The optical length of a 1 m Fabry-Pérot etalon has been determined by swept-frequency interferometry using laser diodes. The method involves progressively building up the measurement accuracy using frequency sweeps over increasing ranges, from 150 MHz (one optical fringe) to 19 GHz and 7 THz. The 7 THz sweep is referenced to the splitting of the rubidium D lines at 780 nm and 795 nm. The result from the 7 THz sweep is sufficiently accurate to use the known frequency of either end point of the scan to determine the length to a few parts in , without the need for any further measurement. The scope for further development of this technique to a range of interferometric systems is discussed.Keywords
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