Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography
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- 7 February 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (6) , 673-675
- https://doi.org/10.1063/1.125896
Abstract
We demonstrated the fabrication of Fresnel zone plates with a 75 nm minimum feature size and circular gratings with a 20 nm minimum linewidth in polymethyl methacrylate using nanoimprint lithography, and in metals by means of a lift-off technique. Observation of sharp Moiré patterns indicated the high fidelity of nanoimprint lithography in pattern duplication. Our results showed that nanoimprint lithography is a promising technology for patterning integrated optics.Keywords
This publication has 12 references indexed in Scilit:
- Design and fabrication of circular grating coupled distributed Bragg reflector lasersOptical Engineering, 1998
- Subwavelength, binary lenses at infrared wavelengthsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Application of X-ray mask fabrication technologies to high resolution, large diameter Ta Fresnel zone platesMicroelectronic Engineering, 1997
- Imprint lithography with sub-10 nm feature size and high throughputMicroelectronic Engineering, 1997
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995
- Cross-linked polymers for nanofabrication of high-resolution zone plates in nickel and germaniumJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Curved grating fabrication techniques for surface-emitting distributed feedback lasersJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Electrically pumped circular-grating distributed-Bragg-reflector lasersIEEE Photonics Technology Letters, 1992
- Circularly symmetric operation of a concentric-circle-grating, surface- emitting, AlGaAs/GaAs quantum-well semiconductor laserApplied Physics Letters, 1992
- High-resolution Fresnel zone plates for soft x raysJournal of Vacuum Science & Technology B, 1988