The influence of specimen thickness on X-ray count rates in STEM-microanalysis
- 1 June 1977
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine
- Vol. 35 (6) , 1537-1542
- https://doi.org/10.1080/14786437708232976
Abstract
Measurements have been made on the variation with thickness of the ratio between the X-ray count rates for CuKα and AIKα in thin foils of an aged A1 6% Zn, 1.98% Mg, 1.34% Cu alloy using scanning transmission electron microscopy. Accurate microanalysis is prevented by what appears to be a copper-rich surface film, probably formed during electrochemical preparation of the specimen. The film is not removed by ion beam thinning but is reduced by chemical etching. The implication of the results in general for microanalysis of thin films is discussed and the importance of specimen preparation emphasized.Keywords
This publication has 5 references indexed in Scilit:
- Electron Microscope Specimen Preparation Techniques in Materials SciencePublished by Springer Nature ,1977
- On the Feasibility of Quantitative Microchemical Analysis of Thin Metal FoilsProceedings, annual meeting, Electron Microscopy Society of America, 1975
- Ion Thinning of Electron Transparent Single Crystal Sapphire SubstratesProceedings, annual meeting, Electron Microscopy Society of America, 1974
- Enhanced X-ray emission from extinction contours in a single-crystal gold filmPhilosophical Magazine, 1962
- The penetration of positive ions of low energy into alloys and composition changes produced in them by sputteringJournal of Physics and Chemistry of Solids, 1959