The penetration of positive ions of low energy into alloys and composition changes produced in them by sputtering
- 1 September 1959
- journal article
- Published by Elsevier in Journal of Physics and Chemistry of Solids
- Vol. 11 (1-2) , 55-67
- https://doi.org/10.1016/0022-3697(59)90041-1
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
- The observation of vacancy sources in metalsPhilosophical Magazine, 1958
- Damage to Silicon Produced by Bombardment with Helium IonsJournal of Applied Physics, 1957
- Radiation Effect of Positive Ion Bombardment on GlassJournal of Applied Physics, 1957
- Elektroneninterferenzen an elektrolytisch polierten Oberflächen nach KathodenzerstäubungThe European Physical Journal A, 1956
- Measurements and Collision—Radiation Damage Theory of High-Vacuum SputteringPhysical Review B, 1955
- Sputtering of Alkali Atoms by Inert Gas Ions of Low EnergyPhysical Review B, 1954
- Cathodic sputtering an analysis of the physical processesVacuum, 1953
- Cathodic Sputtering for Micro-Diffusion StudiesJournal of Applied Physics, 1952
- Cathode Sputtering in the Abnormal Glow DischargePhysical Review B, 1949
- Electrical Discharges in Gases. Part I. Survey of Fundamental ProcessesReviews of Modern Physics, 1930