Tolerance limitations of etched film resistors
- 1 January 1968
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 1 (4) , 309-322
- https://doi.org/10.1016/0040-6090(68)90048-5
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Sheet resistance control of thin Cr-SiO filmsThin Solid Films, 1967
- Resistivity and Structure of Cr–SiO Cermet FilmsJournal of Vacuum Science and Technology, 1967
- Dielectric Thin Films through rf SputteringJournal of Applied Physics, 1966
- Thin-film circuit technology: Part I — Thin-film R-C networksIEEE Spectrum, 1964
- Fly's-Eye Lens Technique for Generating Semiconductor Device Fabrication MasksIBM Journal of Research and Development, 1963