Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin films
- 1 April 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 74 (1-3) , 77-80
- https://doi.org/10.1016/s0924-4247(98)00351-3
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Ferroelectric PLZT thin films deposited by RF triode magnetron sputtering for spatial light modulatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A novel micromachined pump based on thick-film piezoelectric actuationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array methodMaterials Science and Engineering: B, 1998
- Fabrication and characterization of PZT thin-film vibrators for micromotorsSensors and Actuators A: Physical, 1995
- Ferroelectric thin film technology for semiconductor memorySemiconductor Science and Technology, 1995
- Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integrationJournal of Applied Physics, 1994
- Properties of D.C. magnetron-sputtered lead zirconate titanate thin filmsThin Solid Films, 1989