Accuracy assessment of a linear birefringence measurement system using a Soleil–Babinet compensator
- 1 November 2001
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 72 (11) , 4066-4070
- https://doi.org/10.1063/1.1412261
Abstract
This article describes a method for assessing the accuracy of a new linear birefringence measurement system based on photoelastic modulator technology. We used a Soleil–Babinet compensator in the experiment and observed that its retardation varies significantly across the optical aperture. To use this compensator as a meaningful retardation standard, we fixed the beam position relative to the Soleil–Babinet compensator before and after its calibration. Our results show that the birefringence measurement system is capable of providing accurate measurements for linear retardation below 125 nm with a relative uncertainty below 1%. Experimental results support the fact that this birefringence measurement system is self-calibrating for measuring linear retardation.Keywords
This publication has 6 references indexed in Scilit:
- Effect of residual stress in optical glass on the transmitted wavefrontPublished by SPIE-Intl Soc Optical Eng ,2000
- Further evaluation of the Exicor birefringence measurement systemPublished by SPIE-Intl Soc Optical Eng ,2000
- Behavior of fused silica irradiated by low level 193 nm excimer laser for tens of billions of pulsesJournal of Non-Crystalline Solids, 2000
- Measurement of residual birefringence in photomask blanksPublished by SPIE-Intl Soc Optical Eng ,1999
- A new instrument for measuring both the magnitude and angle of low level linear birefringenceReview of Scientific Instruments, 1999
- Piezo-Optical Birefringence Modulators: New Use for a Long-Known EffectJournal of the Optical Society of America, 1969