Surface Modification of Polyimide Films via Plasma-Enhanced Chemical Vapor Deposition of Thin Silica and Nitride Films

This publication has 22 references indexed in Scilit:

• Durability of nanosized oxygen-barrier coatings on polymers
  Progress in Materials Science, 2003
• Surface passivation of silicon with the Plasmodul®
  Surface and Coatings Technology, 2001
• Low dielectric constant polymers for microelectronics
  Progress in Polymer Science, 2001
• Characterization of Carbon-Doped SiO[sub 2] Low k Thin Films: Preparation by Plasma-Enhanced Chemical Vapor Deposition from Tetramethylsilane
  Journal of the Electrochemical Society, 2001
• SiO_x Gas Barrier Coatings on Polymer Substrates: Morphology and Gas Transport Considerations
  The Journal of Physical Chemistry B, 1999
• Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates
  Surface and Coatings Technology, 1996
• Inorganic coatings on polymers
  Surface and Coatings Technology, 1995
• Passivation schemes for copper/polymer thin-film interconnections used in multichip modules
  IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1993
• Distribution of intermediate oxidation states at the silicon/silicon dioxide interface obtained by low-energy ion implantation
  Journal of Vacuum Science & Technology A, 1988
• Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids
  Surface and Interface Analysis, 1979