High resolution electron energy loss spectroscopic characterization of insulators for Si technology
- 31 December 1990
- journal article
- Published by Elsevier in Journal of Electron Spectroscopy and Related Phenomena
- Vol. 54-55, 1013-1032
- https://doi.org/10.1016/0368-2048(90)80292-i
Abstract
No abstract availableFunding Information
- Office of Naval Research
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