Mass Spectrometric Observation of Decomposition Products SFx (x=1, 2) in SF6 Discharge at 13.56 MHz
- 1 February 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (2R) , 967-968
- https://doi.org/10.1143/jjap.32.967
Abstract
The presence of a smaller mass fragment SF2 was indicated from the output signal of a quadrupole mass spectrometer by means of direct sampling from an SF6 discharge space at a pressure of 50 or 100 mTorr. Its intensity was observed to increase with the discharge power according to the degree of fragmentation of SF6.Keywords
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